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Spectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream

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dc.contributor.authorTanışlı, Murat
dc.contributor.authorMertadam, Sercan
dc.contributor.authorŞahi̇n, Nesli̇han
dc.contributor.authorDemi̇r, Süleyman
dc.contributor.authorSüleyman Demi̇r
dc.contributor.orcid0000-0001-7578-7344
dc.contributor.orcid0000-0002-8303-9204
dc.contributor.orcid0000-0003-2120-8516
dc.contributor.orcid0000-0002-5586-4493
dc.contributor.orcid0000-0001-7218-7546
dc.date.accessioned2025-11-13T10:19:19Z
dc.date.issued2016-11-17
dc.identifier.doihttps://doi.org/10.1139/cjp-2016-0597
dc.identifier.endpage200
dc.identifier.issn0008-4204
dc.identifier.issue2
dc.identifier.openalexW2552151661
dc.identifier.startpage190
dc.identifier.urihttps://hdl.handle.net/11421/3797
dc.identifier.urihttps://doi.org/10.1139/cjp-2016-0597
dc.identifier.volume95
dc.language.isoen
dc.relation.ispartofCanadian Journal of Physics
dc.rightsopenAccess
dc.subjectArgon
dc.subjectPhysics
dc.subjectRadio frequency
dc.subjectPlasma
dc.subjectCapacitive sensing
dc.subjectAtomic physics
dc.subjectWavelength
dc.subjectOptics
dc.subjectElectrical engineering
dc.subject.sdg6
dc.titleSpectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream
dc.typeArticle
dspace.entity.typePublication
local.authorid.openalexA5081356758
local.authorid.openalexA5002949584
local.authorid.openalexA5048888583
local.authorid.openalexA5083555197

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