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Optical and electrical properties of capacitive coupled radio frequency Ar-H2 mixture discharge at the low pressure

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dc.contributor.authorTanışlı, Murat
dc.contributor.authorŞahi̇n, Nesli̇han
dc.contributor.authorDemi̇r, Süleyman
dc.contributor.authorN. U. Rehman
dc.contributor.authorSüleyman Demi̇r
dc.contributor.orcid0000-0001-7578-7344
dc.contributor.orcid0000-0003-2120-8516
dc.contributor.orcid0000-0001-6062-5836
dc.contributor.orcid0000-0001-7218-7546
dc.date.accessioned2025-11-13T10:45:14Z
dc.date.issued2017-10-01
dc.identifier.doihttps://doi.org/10.1063/1.4999401
dc.identifier.issn1070-664X
dc.identifier.issue10
dc.identifier.openalexW2763586807
dc.identifier.urihttps://hdl.handle.net/11421/5154
dc.identifier.urihttps://doi.org/10.1063/1.4999401
dc.identifier.volume24
dc.language.isoen
dc.relation.ispartofPhysics of Plasmas
dc.rightsrestrictedAccess
dc.subjectLangmuir probe
dc.subjectPlasma
dc.subjectPlasma diagnostics
dc.subjectPhysics
dc.subjectArgon
dc.subjectRadio frequency
dc.subjectElectron temperature
dc.subjectCapacitive sensing
dc.subjectAtomic physics
dc.subjectWavelength
dc.subjectPlasma parameters
dc.subjectSpectroscopy
dc.subjectEmission spectrum
dc.subjectSpectral line
dc.subjectAnalytical Chemistry (journal)
dc.subjectOptics
dc.subjectChemistry
dc.subject.sdg7
dc.titleOptical and electrical properties of capacitive coupled radio frequency Ar-H2 mixture discharge at the low pressure
dc.typeArticle
dspace.entity.typePublication
local.authorid.openalexA5081356758
local.authorid.openalexA5048888583
local.authorid.openalexA5083555197

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