Yayın:
Optical and electrical properties of capacitive coupled radio frequency Ar-H2 mixture discharge at the low pressure

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2017-10-01

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Araştırma Projeleri

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Anahtar kelimeler

Langmuir probe, Plasma, Plasma diagnostics, Physics, Argon, Radio frequency, Electron temperature, Capacitive sensing, Atomic physics, Wavelength, Plasma parameters, Spectroscopy, Emission spectrum, Spectral line, Analytical Chemistry (journal), Optics, Chemistry

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https://hdl.handle.net/11421/5154
 https://doi.org/10.1063/1.4999401

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