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Electrical characteristics for capacitively coupled radio frequency discharges of helium and neon

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dc.contributor.authorTanışlı, Murat
dc.contributor.authorŞahi̇n, Nesli̇han
dc.contributor.authorDemi̇r, Süleyman
dc.contributor.orcid0000-0001-7578-7344
dc.contributor.orcid0000-0003-2120-8516
dc.contributor.orcid0000-0001-7218-7546
dc.date.accessioned2025-11-13T11:57:57Z
dc.date.issued2017-08-16
dc.identifier.doihttps://doi.org/10.1007/s12043-017-1435-7
dc.identifier.issn0973-7111
dc.identifier.issue3
dc.identifier.openalexW2748563769
dc.identifier.urihttps://hdl.handle.net/11421/8529
dc.identifier.urihttps://doi.org/10.1007/s12043-017-1435-7
dc.identifier.volume89
dc.language.isoen
dc.relation.ispartofPramana
dc.rightsrestrictedAccess
dc.subjectNeon
dc.subjectMaterials science
dc.subjectRadio frequency
dc.subjectHelium
dc.subjectCapacitance
dc.subjectAtomic physics
dc.subjectElectrode
dc.subjectCapacitive sensing
dc.subjectVoltage
dc.subjectPlasma
dc.subjectWaveform
dc.subjectArgon
dc.subjectOptoelectronics
dc.subjectPhysics
dc.subjectElectrical engineering
dc.subject.sdg7
dc.titleElectrical characteristics for capacitively coupled radio frequency discharges of helium and neon
dc.typeArticle
dspace.entity.typePublication
local.authorid.openalexA5081356758
local.authorid.openalexA5048888583
local.authorid.openalexA5083555197

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