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Electrical Characteristics of Capacitive Coupled Radio Frequency Discharges in Argon and Hydrogen

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dc.contributor.authorTanışlı, Murat
dc.contributor.authorŞahi̇n, Nesli̇han
dc.contributor.authorDemi̇r, Süleyman
dc.contributor.authorMertadam, Sercan
dc.contributor.orcid0000-0001-7578-7344
dc.contributor.orcid0000-0003-2120-8516
dc.contributor.orcid0000-0001-7218-7546
dc.contributor.orcid0000-0002-5586-4493
dc.date.accessioned2025-11-13T22:39:05Z
dc.date.issued2019-04-01
dc.identifier.doihttps://doi.org/10.1134/s1063780x19040081
dc.identifier.endpage386
dc.identifier.issn1063-780X
dc.identifier.issue4
dc.identifier.openalexW2947141462
dc.identifier.startpage376
dc.identifier.urihttps://hdl.handle.net/11421/14858
dc.identifier.urihttps://doi.org/10.1134/s1063780x19040081
dc.identifier.volume45
dc.language.isoen
dc.relation.ispartofPlasma Physics Reports
dc.rightsrestrictedAccess
dc.subjectMaterials science
dc.subjectRadio frequency
dc.subjectArgon
dc.subjectCapacitive sensing
dc.subjectLangmuir probe
dc.subjectAtomic physics
dc.subjectVoltage
dc.subjectElectrode
dc.subjectHydrogen
dc.subjectRF power amplifier
dc.subjectPlasma
dc.subjectWaveform
dc.subjectOptoelectronics
dc.subjectAnalytical Chemistry (journal)
dc.subjectPlasma diagnostics
dc.subjectElectrical engineering
dc.subjectPhysics
dc.subjectChemistry
dc.subject.sdg7
dc.titleElectrical Characteristics of Capacitive Coupled Radio Frequency Discharges in Argon and Hydrogen
dc.typeArticle
dspace.entity.typePublication
local.authorid.openalexA5081356758
local.authorid.openalexA5048888583
local.authorid.openalexA5083555197
local.authorid.openalexA5002949584

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