Yayın: Electrical Characteristics of Capacitive Coupled Radio Frequency Discharges in Argon and Hydrogen
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Materials science, Radio frequency, Argon, Capacitive sensing, Langmuir probe, Atomic physics, Voltage, Electrode, Hydrogen, RF power amplifier, Plasma, Waveform, Optoelectronics, Analytical Chemistry (journal), Plasma diagnostics, Electrical engineering, Physics, Chemistry