Optical and electrical properties of capacitive coupled radio frequency Ar-H2 mixture discharge at the low pressure - Murat Tanışlı; Tanışlı, Murat; Nesli̇han Şahi̇n; Şahi̇n, Nesli̇han; Maria Younus; Demi̇r, Süleyman; N. U. Rehman; Süleyman Demi̇r (My University, 2017)
Keywords: Langmuir probe; Plasma; Plasma diagnostics; Physics; Argon; Radio frequency; Electron temperature; Capacitive sensing; Atomic physics; Wavelength; Plasma parameters; Spectroscopy; Emission spectrum; Spectral line; Analytical Chemistry (journal); Optics; Chemistry; 7