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An investigation on optical properties of capacitive coupled radio-frequency mixture plasma with Langmuir probe

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dc.contributor.authorTanışlı, Murat
dc.contributor.authorŞahi̇n, Nesli̇han
dc.contributor.authorDemi̇r, Süleyman
dc.contributor.orcid0000-0001-7578-7344
dc.contributor.orcid0000-0003-2120-8516
dc.contributor.orcid0000-0001-7218-7546
dc.date.accessioned2025-11-13T10:49:49Z
dc.date.issued2017-06-02
dc.identifier.doihttps://doi.org/10.1016/j.ijleo.2017.05.093
dc.identifier.endpage162
dc.identifier.issn0030-4026
dc.identifier.openalexW2620702696
dc.identifier.startpage153
dc.identifier.urihttps://hdl.handle.net/11421/5385
dc.identifier.urihttps://doi.org/10.1016/j.ijleo.2017.05.093
dc.identifier.volume142
dc.language.isoen
dc.relation.ispartofOptik
dc.rightsrestrictedAccess
dc.subjectLangmuir probe
dc.subjectPlasma
dc.subjectMaterials science
dc.subjectPlasma diagnostics
dc.subjectSaturation current
dc.subjectElectron temperature
dc.subjectCapacitive sensing
dc.subjectLangmuir
dc.subjectElectron density
dc.subjectPlasma parameters
dc.subjectAtomic physics
dc.subjectElectron
dc.subjectHelium
dc.subjectSaturation (graph theory)
dc.subjectAnalytical Chemistry (journal)
dc.subjectChemistry
dc.subjectPhysics
dc.subjectVoltage
dc.subjectAdsorption
dc.titleAn investigation on optical properties of capacitive coupled radio-frequency mixture plasma with Langmuir probe
dc.typeArticle
dspace.entity.typePublication
local.authorid.openalexA5081356758
local.authorid.openalexA5048888583
local.authorid.openalexA5083555197

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