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Low Loss Atomic Layer Deposited Al<sub>2</sub>O<sub>3</sub> Waveguides for Applications in On-Chip Optical Amplifiers

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dc.contributor.authorDemirtaş, Mustafa
dc.contributor.authorSevik, Cem
dc.contributor.authorPerkgöz, Nihan Kosku
dc.contributor.authorOdacı, Cem
dc.contributor.authorAy, Feridun
dc.contributor.orcid0000-0001-6832-4341
dc.contributor.orcid0000-0001-5852-1982
dc.contributor.orcid0000-0003-1331-0959
dc.contributor.orcid0000-0002-2412-9672
dc.contributor.orcid0000-0003-2255-1156
dc.date.accessioned2025-11-13T09:40:52Z
dc.date.issued2018-04-18
dc.identifier.doihttps://doi.org/10.1109/jstqe.2018.2825880
dc.identifier.endpage8
dc.identifier.issn1077-260X
dc.identifier.issue4
dc.identifier.openalexW2798566080
dc.identifier.startpage1
dc.identifier.urihttps://hdl.handle.net/11421/1863
dc.identifier.urihttps://doi.org/10.1109/jstqe.2018.2825880
dc.identifier.volume24
dc.language.isoen
dc.relation.ispartofIEEE Journal of Selected Topics in Quantum Electronics
dc.rightsrestrictedAccess
dc.subjectWaveguide
dc.subjectMaterials science
dc.subjectEllipsometry
dc.subjectSpectroscopy
dc.subjectAnalytical Chemistry (journal)
dc.subjectPlanar
dc.subjectPhysics
dc.subjectThin film
dc.subjectOptics
dc.subjectOptoelectronics
dc.subjectChemistry
dc.subjectNanotechnology
dc.subjectComputer science
dc.titleLow Loss Atomic Layer Deposited Al<sub>2</sub>O<sub>3</sub> Waveguides for Applications in On-Chip Optical Amplifiers
dc.typeArticle
dspace.entity.typePublication
local.authorid.openalexA5089063628
local.authorid.openalexA5005966345
local.authorid.openalexA5025184803
local.authorid.openalexA5038577039
local.authorid.openalexA5059641863

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