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Optical characteristics for capacitively and inductively radio frequency discharge and post-discharge of helium

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dc.contributor.authorTanışlı, Murat
dc.contributor.authorŞahi̇n, Nesli̇han
dc.contributor.orcid0000-0001-7578-7344
dc.contributor.orcid0000-0003-2120-8516
dc.date.accessioned2025-11-13T10:19:08Z
dc.date.issued2016-01-01
dc.identifier.doihttps://doi.org/10.1063/1.4940783
dc.identifier.issn1070-664X
dc.identifier.issue1
dc.identifier.openalexW2272829846
dc.identifier.urihttps://hdl.handle.net/11421/3787
dc.identifier.urihttps://doi.org/10.1063/1.4940783
dc.identifier.volume23
dc.language.isoen
dc.relation.ispartofPhysics of Plasmas
dc.rightsrestrictedAccess
dc.subjectInductively coupled plasma
dc.subjectInductively coupled plasma atomic emission spectroscopy
dc.subjectHelium
dc.subjectPlasma
dc.subjectAtomic physics
dc.subjectCapacitively coupled plasma
dc.subjectArgon
dc.subjectPlasma diagnostics
dc.subjectRadio frequency
dc.subjectPhysics
dc.subjectSpectrometer
dc.subjectAnalytical Chemistry (journal)
dc.subjectEmission spectrum
dc.subjectSpectral line
dc.subjectChemistry
dc.subjectOptics
dc.subjectNuclear physics
dc.subject.sdg7
dc.titleOptical characteristics for capacitively and inductively radio frequency discharge and post-discharge of helium
dc.typeArticle
dspace.entity.typePublication
local.authorid.openalexA5081356758
local.authorid.openalexA5048888583

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