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Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method

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dc.contributor.authorPat, Şuat
dc.contributor.orcid0000-0001-9301-8880
dc.date.accessioned2025-11-13T22:29:25Z
dc.date.issued2016-04-25
dc.identifier.doihttps://doi.org/10.18038/btda.52472
dc.identifier.issn2146-0205
dc.identifier.issue1
dc.identifier.openalexW2344556696
dc.identifier.urihttps://hdl.handle.net/11421/14339
dc.identifier.urihttps://doi.org/10.18038/btda.52472
dc.identifier.volume17
dc.language.isoen
dc.relation.ispartofAnadolu University journal of science and technology- a - applied sciences and engineering :
dc.rightsopenAccess
dc.subjectSputtering
dc.subjectMaterials science
dc.subjectHexagonal crystal system
dc.subjectNano-
dc.subjectThin film
dc.subjectNanotechnology
dc.subjectOptoelectronics
dc.subjectCrystallography
dc.subjectComposite material
dc.subjectChemistry
dc.titleNitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method
dc.typeArticle
dspace.entity.typePublication
local.authorid.openalexA5043671717

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